Machining with tight tolerances

Semiconductor production involves a series of highly complex manufacturing steps that are used to produce integrated circuits on silicon wafers. Among other things, EUV lithography systems are used to project extremely fine structures onto the wafers. The system consists of thousands of high-precision aluminum and stainless steel components with mirror-like surfaces. The individual components are used in a vacuum chamber and must meet high standards in terms of purity, precision, stability, and vacuum tightness.

A machine pallet is a tool used in manufacturing technology that serves as a carrier for workpieces or clamping devices. The pallet enables workpieces to be clamped and positioned outside the machine. With its high strength and rigidity, steel is well suited as a material for a machine pallet. When machining steel, it is important to ensure a suitable cutting speed, adequate cooling, and stable clamping conditions in order to avoid tool wear and dimensional deviations.